Granted Patent
Utility
US 6,553,049 · App. 09/451,750
ArF laser with low pulse energy and high rep rate
Inventors:
Herve A. Besaucele, Jean-Marc Hueber, Alexander I. Ershov, Thomas Hofmann, Vladimir B. Fleurov
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Nov 30, 1999
Inventors
Herve A. Besaucele
Jean-Marc Hueber
Alexander I. Ershov
Thomas Hofmann
Vladimir B. Fleurov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.