Granted Patent
Utility
US 6,553,170 · App. 09/945,300
Method and system for a combination of high boron and low boron BPSG top clad fabrication process for a planar lightwave circuit
Inventors:
Fan Zhong, Kangjie Li
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Aug 31, 2001
Inventors
Fan Zhong
Kangjie Li
Assignee (at issue)
LIGHTWAVE MICROSYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.