Granted Patent
Utility
US 6,555,421 · App. 09/758,238
Method and apparatus for manufacturing semiconductor device
Inventors:
Naoko Matsuyama, Sinya Sasaki
Patented Case
View Patent ↗
Granted: Apr 29, 2003
Filed: Jan 12, 2001
Inventors
Naoko Matsuyama
Sinya Sasaki
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.