Granted Patent
Utility
US 6,555,828 · App. 09/193,198
Method and apparatus for inspecting reflection masks for defects
Inventors:
Jeffrey Bokor, Yun-Chong Lin
Patented Case
View Patent ↗
Granted: Apr 29, 2003
Filed: Nov 17, 1998
Inventors
Jeffrey Bokor
Yun-Chong Lin
Assignee (at issue)
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.