Granted Patent
Utility
US 6,556,281 · App. 09/575,998
Flexible piezoelectric chuck and method of using the same
Inventors:
Pradeep K. Govil, Jorge Ivaldi
Patented Case
View Patent ↗
Granted: Apr 29, 2003
Filed: May 23, 2000
Inventors
Pradeep K. Govil
Jorge Ivaldi
Assignee (at issue)
ASML US, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.