Granted Patent
Utility
US 6,556,652 · App. 09/635,212
Measurement of critical dimensions using X-rays
Inventors:
Isaac Mazor, Boris Yokhin, Amos Gvirtzman
Patented Case
View Patent ↗
Granted: Apr 29, 2003
Filed: Aug 9, 2000
Inventors
Isaac Mazor
Boris Yokhin
Amos Gvirtzman
Assignee (at issue)
Jordan Valley Applied Radiation Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.