Granted Patent
Utility
US 6,556,741 · App. 09/697,762
MEMS optical switch with torsional hinge and method of fabrication thereof
Inventor:
Li Fan
Patented Case
View Patent ↗
Granted: Apr 29, 2003
Filed: Oct 25, 2000
Inventor
Li Fan
Assignee (at issue)
OMM, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.