Granted Patent
Utility
US 6,556,893 · App. 10/193,926
Robotic system control
Inventors:
Subodha Kumar, Natarajan Ramanan, Chelliah Sriskandarajah
Patented Case
View Patent ↗
Granted: Apr 29, 2003
Filed: Jul 12, 2002
Inventors
Subodha Kumar
Natarajan Ramanan
Chelliah Sriskandarajah
Assignees (at issue)
FSI INTERNATIONAL, INC.
The University of Texas at Dallas
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.