IP Library Granted Patent US 6,557,414
Granted Patent Utility
US 6,557,414 · App. 09/970,710

Inertia sensor and method of fabricating the same

Inventors: Kohei Sakurai, Masahiro Komachiya, Masahiro Matsumoto, Seikou Suzuki
Patented Case View Patent ↗
Granted: May 6, 2003 Filed: Oct 5, 2001
Inventors
Kohei Sakurai
Masahiro Komachiya
Masahiro Matsumoto
Seikou Suzuki
Assignee (at issue)
HITACHI, LTD.

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Quick Facts
Patent No.
US 6,557,414
App. No.
09/970,710
Filed
2001-10-05
Granted
2003-05-06
Kind
B2