Granted Patent
Utility
US 6,558,053 · App. 10/125,229
Substrate processing apparatus
Inventors:
Kazuhito Shigemori, Masakazu Sanada, Minobu Matsunaga, Katsushi Yoshioka, Kenji Sugimoto, Kaoru Aoki, Moritaka Yano, Satoshi Yamamoto, Tsuyoshi Mitsuhashi, Takashi Nagao, Mitsumasa Kodama, Yukihiko Inagaki, Yoshihisa Yamada
Patented Case
View Patent ↗
Granted: May 6, 2003
Filed: Apr 18, 2002
Inventors
Kazuhito Shigemori
Masakazu Sanada
Minobu Matsunaga
Katsushi Yoshioka
Kenji Sugimoto
Kaoru Aoki
Moritaka Yano
Satoshi Yamamoto
Tsuyoshi Mitsuhashi
Takashi Nagao
Mitsumasa Kodama
Yukihiko Inagaki
Yoshihisa Yamada
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.