IP Library › Granted Patent US 6,559,002
Granted Patent Utility
US 6,559,002 · App. 10/032,041

Rough oxide hard mask for DT surface area enhancement for DT DRAM

Inventors: Stephan Kudelka, Helmut Tews, Stephen Rahn, Irene McStay, Uwe Schroeder
Patented Case View Patent ↗
Granted: May 6, 2003 Filed: Dec 31, 2001
Inventors
Stephan Kudelka
Helmut Tews
Stephen Rahn
Irene McStay
Uwe Schroeder
Assignee (at issue)
Infineon Technologies North America Corp.

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 6,559,002
App. No.
10/032,041
Filed
2001-12-31
Granted
2003-05-06
Kind
B1