Granted Patent
Utility
US 6,559,060 · App. 09/951,284
Process for the structuring of a substrate
Inventors:
Uwe Hamm, Markus Kasparek, Oliver Jacobs
Patented Case
View Patent ↗
Granted: May 6, 2003
Filed: Sep 13, 2001
Inventors
Uwe Hamm
Markus Kasparek
Oliver Jacobs
Assignee (at issue)
Carl Zeiss Stiftung
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.