Granted Patent
Utility
US 6,559,067 · App. 10/073,554
Method for patterning an organic antireflection layer
Inventors:
Matthias Lehr, Gregoire Grandremy
Patented Case
View Patent ↗
Granted: May 6, 2003
Filed: Feb 11, 2002
Inventors
Matthias Lehr
Gregoire Grandremy
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.