Granted Patent
Utility
US 6,559,543 · App. 09/991,769
Stacked fill structures for support of dielectric layers
Inventors:
Timothy G. Dunham, Howard S. Landis, William T. Motsiff
Patented Case
View Patent ↗
Granted: May 6, 2003
Filed: Nov 16, 2001
Inventors
Timothy G. Dunham
Howard S. Landis
William T. Motsiff
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.