Granted Patent
Utility
US 6,561,213 · App. 09/874,084
Fluid distribution system and process, and semiconductor fabrication facility utilizing same
Inventors:
Luping Wang, Terry A. Tabler, James Dietz
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Jun 5, 2001
Inventors
Luping Wang
Terry A. Tabler
James Dietz
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.