Granted Patent
Utility
US 6,561,218 · App. 09/912,043
Small internal volume fluid mass flow control apparatus
Inventor:
Daniel T. Mudd
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Jul 24, 2001
Inventor
Daniel T. Mudd
Assignee (at issue)
Fugasity Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.