Granted Patent
Utility
US 6,561,870 · App. 09/823,593
Adjustable force applying air platen and spindle system, and methods for using the same
Inventors:
Miguel Saldana, Aleksander Owczarz
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Mar 30, 2001
Inventors
Miguel Saldana
Aleksander Owczarz
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.