IP Library Granted Patent US 6,562,094
Granted Patent Utility
US 6,562,094 · App. 09/900,526

Reticle storage and retrieval system

Inventors: Jeffrey M. Denker, John T. Hickey, Peter J. B. Teague, David Jordan, Jonathan Gordan, Mitchell Weiss
Patented Case View Patent ↗
Granted: May 13, 2003 Filed: Jul 6, 2001
Inventors
Jeffrey M. Denker
John T. Hickey
Peter J. B. Teague
David Jordan
Jonathan Gordan
Mitchell Weiss
Assignee (at issue)
PRI Automation, Inc.

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Quick Facts
Patent No.
US 6,562,094
App. No.
09/900,526
Filed
2001-07-06
Granted
2003-05-13
Kind
B2