Granted Patent
Utility
US 6,562,635 · App. 10/083,710
Method of controlling metal etch processes, and system for accomplishing same
Inventors:
Kevin R. Lensing, James Broc Stirton, Matthew A. Purdy
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Feb 26, 2002
Inventors
Kevin R. Lensing
James Broc Stirton
Matthew A. Purdy
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.