IP Library Granted Patent US 6,562,642
Granted Patent Utility
US 6,562,642 · App. 10/072,330

Micro-structures and methods for their manufacture

Inventors: Guy M. Cohen, Steven A. Cordes, Joanna Rosner, Jeannine M. Trewhella
Patented Case View Patent ↗
Granted: May 13, 2003 Filed: Feb 7, 2002
Inventors
Guy M. Cohen
Steven A. Cordes
Joanna Rosner
Jeannine M. Trewhella
Assignee (at issue)
International Business Machines Corporation

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Quick Facts
Patent No.
US 6,562,642
App. No.
10/072,330
Filed
2002-02-07
Granted
2003-05-13
Kind
B1