Granted Patent
Utility
US 6,562,716 · App. 09/726,654
Method for fabricating semiconductor device
Inventors:
Shin Hashimoto, Kyoko Egashira
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Dec 1, 2000
Inventors
Shin Hashimoto
Kyoko Egashira
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.