Granted Patent
Utility
US 6,562,721 · App. 09/754,638
Dry etching method and method of manufacturing semiconductor device
Inventor:
Yasuhiko Ueda
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Jan 4, 2001
Inventor
Yasuhiko Ueda
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.