Granted Patent
Utility
US 6,562,733 · App. 09/163,170
Semiconductor device manufacturing method
Inventor:
Mitsuhiro Horikawa
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Sep 30, 1998
Inventor
Mitsuhiro Horikawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.