Granted Patent
Utility
US 6,563,106 · App. 09/929,900
Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same
Inventors:
John E. Bowers, Roger Helkey, Charles M. Corbalis, Robert Kehl Sink, Seung-bok LEE, Noel C. MacDonald
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Aug 14, 2001
Inventors
John E. Bowers
Roger Helkey
Charles M. Corbalis
Robert Kehl Sink
Seung-bok LEE
Noel C. MacDonald
Assignee (at issue)
Calient Networks, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.