Granted Patent
Utility
US 6,563,128 · App. 10/074,059
Base stabilization system
Inventors:
Leonard Lublin, David J. Warkentin, Baruch Pletner, John Allen Rule
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Feb 11, 2002
Inventors
Leonard Lublin
David J. Warkentin
Baruch Pletner
John Allen Rule
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.