IP Library › Granted Patent US 6,563,254
Granted Patent Utility
US 6,563,254 · App. 10/047,199

Inertial/audio unit and construction

Inventors: Richard Perkins, Gerald F. Caron, Erik Saarmaa
Patented Case View Patent ↗
Granted: May 13, 2003 Filed: Jan 15, 2002
Inventors
Richard Perkins
Gerald F. Caron
Erik Saarmaa
Assignee (at issue)
Cymer, LLC

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Quick Facts
Patent No.
US 6,563,254
App. No.
10/047,199
Filed
2002-01-15
Granted
2003-05-13
Kind
B2