Granted Patent
Utility
US 6,563,564 · App. 09/878,182
Method of operating an optical imaging system, lithographic projection apparatus, device manufacturing method, and device manufactured thereby
Inventors:
Christianus Gerardus Maria De Mol, Thomas Josephus Maria Castenmiller, Marcel Van Dijk, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Catharina Johanna Lucia Maria van den Enden
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Jun 12, 2001
Inventors
Christianus Gerardus Maria De Mol
Thomas Josephus Maria Castenmiller
Marcel Van Dijk
Franciscus Antonius Chrysogonus Marie Commissaris
Simon De Groot
Catharina Johanna Lucia Maria van den Enden
Assignee (at issue)
ASM Lithography B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.