Granted Patent
Utility
US 6,563,907 · App. 10/005,600
Radiation source with shaped emission
Inventors:
Glenn D. Kubiak, William C. Sweatt
Patented Case
View Patent ↗
Granted: May 13, 2003
Filed: Dec 7, 2001
Inventors
Glenn D. Kubiak
William C. Sweatt
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.