IP Library › Granted Patent US 6,566,019
Granted Patent Utility
US 6,566,019 · App. 09/843,498

Using double exposure effects during phase shifting to control line end shortening

Inventors: Michael E. Kling, Hua-Yu Liu
Patented Case View Patent ↗
Granted: May 20, 2003 Filed: Apr 25, 2001
Inventors
Michael E. Kling
Hua-Yu Liu
Assignee (at issue)
Numerical Technologies, Inc.

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Quick Facts
Patent No.
US 6,566,019
App. No.
09/843,498
Filed
2001-04-25
Granted
2003-05-20
Kind
B2