Granted Patent
Utility
US 6,566,041 · App. 09/757,841
Photomask and pattern forming method used in a thermal flow process and semiconductor integrated circuit fabricated using the thermal flow process
Inventors:
Haruo Iwasaki, Shinji Ishida, Tsuyoshi Yoshii
Patented Case
View Patent ↗
Granted: May 20, 2003
Filed: Jan 10, 2001
Inventors
Haruo Iwasaki
Shinji Ishida
Tsuyoshi Yoshii
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.