Granted Patent
Utility
US 6,566,232 · App. 09/691,112
Method of fabricating semiconductor device
Inventors:
Akitoshi Hara, Eiichi Sato
Patented Case
View Patent ↗
Granted: May 20, 2003
Filed: Oct 19, 2000
Inventors
Akitoshi Hara
Eiichi Sato
Assignee (at issue)
SEIKO EPSON CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.