Granted Patent
Utility
US 6,566,252 · App. 09/689,144
Method for simultaneous deposition and sputtering of TEOS and device thereby formed
Inventors:
Paul R. Besser, Minh Van Ngo
Patented Case
View Patent ↗
Granted: May 20, 2003
Filed: Oct 11, 2000
Inventors
Paul R. Besser
Minh Van Ngo
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.