IP Library › Granted Patent US 6,566,271
Granted Patent Utility
US 6,566,271 · App. 09/671,827

Method of producing a semiconductor surface covered with fluorine

Inventors: Alexander Gschwandtner, Gudrun Innertsberger, Andreas Grassl, Barbara Fröschle, Martin Kerber, Alexander Mattheus
Patented Case View Patent ↗
Granted: May 20, 2003 Filed: Sep 27, 2000
Inventors
Alexander Gschwandtner
Gudrun Innertsberger
Andreas Grassl
Barbara Fröschle
Martin Kerber
Alexander Mattheus
Assignee (at issue)
Infineon Technologies AG

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Quick Facts
Patent No.
US 6,566,271
App. No.
09/671,827
Filed
2000-09-27
Granted
2003-05-20
Kind
B1