Granted Patent
Utility
US 6,566,628 · App. 09/972,491
Method and device for thin-film ablation of a substrate
Inventors:
Helmut Vogt, Franz Karg
Patented Case
View Patent ↗
Granted: May 20, 2003
Filed: Oct 5, 2001
Inventors
Helmut Vogt
Franz Karg
Assignee (at issue)
Siemens and Shell Solar GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.