Granted Patent
Utility
US 6,567,450 · App. 09/943,343
Very narrow band, two chamber, high rep rate gas discharge laser system
Inventors:
David W. Myers, Herve A. Besaucele, Alexander I. Ershov, William N. Partlo, Richard L. Sandstrom, Palash P. Das, Stuart L. Anderson, Igor V. Fomenkov, Richard C. Ujazdowski, Xiaojiang Pan, Eckehard D. Onkels, Richard M. Ness, Daniel J. W. Brown
Patented Case
View Patent ↗
Granted: May 20, 2003
Filed: Aug 29, 2001
Inventors
David W. Myers
Herve A. Besaucele
Alexander I. Ershov
William N. Partlo
Richard L. Sandstrom
Palash P. Das
Stuart L. Anderson
Igor V. Fomenkov
Richard C. Ujazdowski
Xiaojiang Pan
Eckehard D. Onkels
Richard M. Ness
Daniel J. W. Brown
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.