Granted Patent
Utility
US 6,567,715 · App. 09/553,989
Method and system for automated on-chip material and structural certification of MEMS devices
Inventors:
Michael B. Sinclair, Maarten P. DeBoer, Norman Smith, Brian D. Jensen, Samuel Lee Miller
Patented Case
View Patent ↗
Granted: May 20, 2003
Filed: Apr 19, 2000
Inventors
Michael B. Sinclair
Maarten P. DeBoer
Norman Smith
Brian D. Jensen
Samuel Lee Miller
Assignee (at issue)
Sandia Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.