Granted Patent
Utility
US 6,568,290 · App. 09/636,264
Method of measuring dishing using relative height measurement
Inventor:
Jaime Poris
Patented Case
View Patent ↗
Granted: May 27, 2003
Filed: Aug 10, 2000
Inventor
Jaime Poris
Assignee (at issue)
Nanometrics Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.