Granted Patent
Utility
US 6,569,237 · App. 09/884,994
Method of pulling up silicon single crystal and method of manufacturing epitaxial wafer
Inventors:
Tadami Tanaka, Toshiaki Ono, Eiichi Asayama
Patented Case
View Patent ↗
Granted: May 27, 2003
Filed: Jun 21, 2001
Inventors
Tadami Tanaka
Toshiaki Ono
Eiichi Asayama
Assignee (at issue)
SUMITOMO METAL INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.