Granted Patent
Utility
US 6,569,701 · App. 10/002,725
Method for fabricating an isolated microelectromechanical system device
Inventors:
Michael J. Knieser, Robert J. Kretschmann, Mark A. Lucak, Richard D. Harris
Patented Case
View Patent ↗
Granted: May 27, 2003
Filed: Oct 25, 2001
Inventors
Michael J. Knieser
Robert J. Kretschmann
Mark A. Lucak
Richard D. Harris
Assignee (at issue)
Rockwell Automation Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.