Granted Patent
Utility
US 6,569,772 · App. 10/075,540
Method for producing an alternating phase mask
Inventors:
Josef Mathuni, Jurgen Knobloch, Christoph Nolscher
Patented Case
View Patent ↗
Granted: May 27, 2003
Filed: Feb 14, 2002
Inventors
Josef Mathuni
Jurgen Knobloch
Christoph Nolscher
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.