IP Library Granted Patent US 6,570,221
Granted Patent Utility
US 6,570,221 · App. 08/097,183

Bonding of silicon wafers

Inventor: Derryl D. J. Allman
Patented Case View Patent ↗
Granted: May 27, 2003 Filed: Jul 27, 1993
Inventor
Derryl D. J. Allman
Assignee (at issue)
Hyundai Electronics America

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Quick Facts
Patent No.
US 6,570,221
App. No.
08/097,183
Filed
1993-07-27
Granted
2003-05-27
Kind
B1