Granted Patent
Utility
US 6,570,656 · App. 09/546,114
Illumination fluence regulation system and method for use in thermal processing employed in the fabrication of reduced-dimension integrated circuits
Inventors:
James B. Owens, Jr., Somit Talwar, Andrew M. Hawryluk, Yun Wang
Patented Case
View Patent ↗
Granted: May 27, 2003
Filed: Apr 10, 2000
Inventors
James B. Owens, Jr.
Somit Talwar
Andrew M. Hawryluk
Yun Wang
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.