Granted Patent
Utility
US 6,571,383 · App. 09/562,700
Semiconductor device fabrication using a photomask designed using modeling and empirical testing
Inventors:
Shahid Butt, Henning Haffner, Beate Frankowsky
Patented Case
View Patent ↗
Granted: May 27, 2003
Filed: Apr 28, 2000
Inventors
Shahid Butt
Henning Haffner
Beate Frankowsky
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.