IP Library › Granted Patent US 6,571,806
Granted Patent Utility
US 6,571,806 · App. 09/837,536

Method for drying a substrate

Inventors: Michael Rosano, Muhammad Asif, Robert Pui Chi Fung
Patented Case View Patent ↗
Granted: Jun 3, 2003 Filed: Apr 17, 2001
Inventors
Michael Rosano
Muhammad Asif
Robert Pui Chi Fung
Assignee (at issue)
Komag, Inc.

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Quick Facts
Patent No.
US 6,571,806
App. No.
09/837,536
Filed
2001-04-17
Granted
2003-06-03
Kind
B2