Granted Patent
Utility
US 6,572,218 · App. 09/768,676
Electrostatically-actuated device having a corrugated multi-layer membrane structure
Inventors:
Peter M. Gulvin, Elliott A. Eklund
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Jan 24, 2001
Inventors
Peter M. Gulvin
Elliott A. Eklund
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.