IP Library Granted Patent US 6,572,320
Granted Patent Utility
US 6,572,320 · App. 09/907,523

Robot for handling workpieces in an automated processing system

Inventor: Jeffry Davis
Patented Case View Patent ↗
Granted: Jun 3, 2003 Filed: Jul 16, 2001
Inventor
Jeffry Davis
Assignee (at issue)
Semitool, Inc.

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Quick Facts
Patent No.
US 6,572,320
App. No.
09/907,523
Filed
2001-07-16
Granted
2003-06-03
Kind
B2