Granted Patent
Utility
US 6,572,445 · App. 09/863,582
Multizone slurry delivery for chemical mechanical polishing tool
Inventor:
Thomas Laursen
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: May 16, 2001
Inventor
Thomas Laursen
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.