Granted Patent
Utility
US 6,572,456 · App. 09/927,142
Bathless wafer measurement apparatus and method
Inventors:
Michael Weber-Grabau, Ivelin A. Anguelov, Edric Tong, Adam E. Norton, Fred E. Stanke, Badru D. Hyatt
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Aug 10, 2001
Inventors
Michael Weber-Grabau
Ivelin A. Anguelov
Edric Tong
Adam E. Norton
Fred E. Stanke
Badru D. Hyatt
Assignee (at issue)
Sensys Instruments Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.