Granted Patent
Utility
US 6,572,701 · App. 09/968,629
System for separating and recovering waste fluid and spin coater
Inventors:
Toshikazu Yamauchi, Yasuharu Oota
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Oct 2, 2001
Inventors
Toshikazu Yamauchi
Yasuharu Oota
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.