Granted Patent
Utility
US 6,572,738 · App. 09/536,711
Vacuum treatment system and process for manufacturing workpieces
Inventor:
Othmar Zueger
Patented Case
View Patent ↗
Granted: Jun 3, 2003
Filed: Mar 28, 2000
Inventor
Othmar Zueger
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.